Micromachining upscaling from W to kW: the evolution of femtosecond laser applications

Laser applications in microelectronic and optoelectronic manufacturing. Conference 2026

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Authors: Anne Henrottin, Jérôme Patars, Antoine Defroidmont, Marc Décultot, Audrey Champion, Céline Petit, David Bruneel
DOI: 10.1117/12.3077171
Cited by: 0

Fields of Study & Subjects

Laser Material Processing Techniques Laser-Matter Interactions and Applications Advanced Machining and Optimization Techniques

Publication details

Journal / source
Laser applications in microelectronic and optoelectronic manufacturing. Conference
Pages
8–8
Publication date
4 March 2026
Language
EN