Highly-stable and compact immersion micro-optical system for robust photonic integration
Fields of Study & Subjects
Near-Field Optical Microscopy
Photonic and Optical Devices
Semiconductor Lasers and Optical Devices
Publication details
- Journal / source
- MOEMS and Miniaturized Systems XXV
- Publisher
- SPIE
- Pages
- 13–13
- Publication date
- 4 March 2026