DUV quasi-CW laser of average power scalable over 10 W and long lifetime using CLBO crystal for industrial application

SPIE Solid State Lasers: Technology and Devices 2026

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Authors: Akio Shimura, Hiroki Hirano, Takumi FURUYAMA, Asami Honda, Kota Koike, Hiro Asano, Takeo Nakamura, Masanori Nagaoka, Riku ENDO, Mitsuyoshi Sakairi, Tatsuya Yanagida
DOI: 10.1117/12.3077857
Cited by: 0
References: 1

Abstract

We have developed a Yb-fiber-based 266-nm DUV picosecond pulsed laser with a repetition rate of 100 MHz and a maximum output average power of 12 W, employing a TSSG-grown CsLiB6O10 (CLBO) crystal. A 400-hour operation test at an 8-W output showed no signs of degradation in the crystal. The laser maintained excellent beam quality (M2

Fields of Study & Subjects

Solid State Laser Technologies Photonic Crystal and Fiber Optics Laser Material Processing Techniques

Publication details

Journal / source
SPIE Solid State Lasers: Technology and Devices
Pages
10–10
Publication date
4 March 2026
Language
EN