Square-substrate UV-NIL for SRG waveguides production: high alignment accuracy and 85% throughput gain with production-grade uniformity

2026

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Authors: Ran Ji, Junjie Sun, Xiaolong Wang

DOI: 10.1117/12.3077967

Cited by: 0

Fields of Study & Subjects

Nanofabrication and Lithography Techniques Advancements in Photolithography Techniques Photonic and Optical Devices