Data-efficient AI framework for optimizing germanium epitaxial layer growth in semiconductor processes

SPIE Silicon Photonics 2026

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Authors: Furen Zhuang, Ashish James, Xuân Sáng Nguyễn, HyunSu Jun, Peisheng Qian, Zhongyao Cheng, Shiv Kumar, Navab Singh

DOI: 10.1117/12.3078435

Cited by: 0

References: 4

Fields of Study & Subjects

Machine Learning in Materials Science Semiconductor materials and interfaces Semiconductor materials and devices

References 4