Next-generation microimprinting: enabling ultraflat base layers for high-end micro-optics applications

Advanced Fabrication Technologies for Micro/Nano Optics and Photonics 2026

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Authors: Mirco Altana, Marc Schnieper, Stephan Heimgartner
DOI: 10.1117/12.3078649
Cited by: 0
References: 7

Fields of Study & Subjects

Advanced optical system design Nanofabrication and Lithography Techniques Optical Coatings and Gratings

Publication details

Journal / source
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics
Pages
18–18
Publication date
4 March 2026
Language
EN