Development of multispectrum analysis system in micro-ellipsometry for high-accuracy thin-film metrology

2026

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Authors: Dong-Geun Yang, Hyug-Gyo Rhee, Young-Sik Ghim

DOI: 10.1117/12.3079077

Cited by: 0

References: 3

Fields of Study & Subjects

Optical Polarization and Ellipsometry Electron and X-Ray Spectroscopy Techniques Surface Roughness and Optical Measurements

References 3