Polarization study on 1130nm VCSEL with integrated surface relief mode coupler

We present polarization control through integrated surface relief structure on 1130 nm VCSELs. Surface relief structures are designed and manufactured using 6” GaAs fab line onto 1130 nm VCSEL to select and stabilize polarization. Studies on optimization of VCSEL oxidation and its relative location to surface relief structures are presented. Data shows that polarization can be controlled by adjusting the surface relief design (thickness, location, and shape), and optimization, polarization can be locked throughout the operating range and temperature with PER over 18 dB. Statistical analysis and distribution data from various designs demonstrate the consistency and robustness of this approach. Preliminary reliability results will be shared to support the feasibility for mass production. These results provide an alternative way to manufacture polarized 1130nm VCSELs in a more controllable environment.