Realtime measurement of the ablation rate during ultrashort pulsed laser processing

Laser applications in microelectronic and optoelectronic manufacturing. Conference 2026

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Authors: Markus Kogel‐Hollacher, Simon Mieth, Jean Francois Pichot, Wilhelm Pfleging, R. Kraft
DOI: 10.1117/12.3079158
Cited by: 0

Fields of Study & Subjects

Laser Material Processing Techniques Advanced Machining and Optimization Techniques Laser-Ablation Synthesis of Nanoparticles

Publication details

Journal / source
Laser applications in microelectronic and optoelectronic manufacturing. Conference
Pages
26–26
Publication date
4 March 2026
Language
EN