Machine learning-assisted laser thinning of silicon using integrated multimodal online diagnostics

Laser-based Micro- and Nanoprocessing 2026

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Authors: Eric P. Mottay, Emile Barjou, Wahib Mirgan Barkat, Garvan Auble, Bastien Bullot, Girolamo Mincuzzi, Anthony Bertrand
DOI: 10.1117/12.3079273
Cited by: 0

Fields of Study & Subjects

Laser Material Processing Techniques Advanced Surface Polishing Techniques Advanced Machining and Optimization Techniques

Publication details

Journal / source
Laser-based Micro- and Nanoprocessing
Pages
27–27
Publication date
4 March 2026
Language
EN