Quality-factor of tantalum resonators on 300mm silicon substrate

2026

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Authors: Yong Chyn Ng, Norhanani Binte Jaafar, Binni Varghese, Hongyu Li

DOI: 10.1117/12.3079433

Cited by: 0

References: 11

Fields of Study & Subjects

Acoustic Wave Resonator Technologies Advanced MEMS and NEMS Technologies Semiconductor materials and devices

References 11