Compact 193nm light pulse generator for deep ultraviolet LIDT station

Laser-based Micro- and Nanoprocessing 2026

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Authors: Rikuo Koike, Koji Tamate, Hironori Igarashi, Hiroaki Motosugi, Atsushi Fuchimukai, Taisuke Miura
DOI: 10.1117/12.3079436
Cited by: 0
References: 14

Fields of Study & Subjects

Pulsed Power Technology Applications Laser-Matter Interactions and Applications Laser Design and Applications

Publication details

Journal / source
Laser-based Micro- and Nanoprocessing
Pages
54–54
Publication date
4 March 2026
Language
EN