High-uniformity HBr wet etching for compound semiconductor optoelectronics using precision single-wafer processing

Smart Photonic and Optoelectronic Integrated Circuits 2026

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Authors: Ismail Kashkoush, Sarah Pecha

DOI: 10.1117/12.3079444

Cited by: 0

References: 1

Fields of Study & Subjects

Low-Pressure Plasma Processing and Diagnostics Semiconductor materials and devices Advanced Surface Polishing Techniques

References 1