Very low loss sputtered SiN waveguides compatible with 300mm BEOL integration

SPIE Silicon Photonics 2026

View at publisher
Authors: Laura C. Sauze, Eleonora Garoni, Quentin Wilmart, Benjamin Dey, Guillaume Rodriguez, Lavinia Elena Nistor
DOI: 10.1117/12.3079616
Cited by: 0
References: 4

Fields of Study & Subjects

Photonic and Optical Devices Copper Interconnects and Reliability GaN-based semiconductor devices and materials

Publication details

Journal / source
SPIE Silicon Photonics
Pages
12–12
Publication date
4 March 2026
Language
EN