Nanometer-precision wafer thinning monitoring via comb-based terahertz Fabry–Pérot interferometry

Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications 2026

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Authors: Guseon Kang, Jaeyoon Kim, Dong-Chel Shin, Joohyung Lee, Seung-Woo Kim, Young-Jin Kim
DOI: 10.1117/12.3079660
Cited by: 0
References: 3

Fields of Study & Subjects

Terahertz technology and applications Advanced Measurement and Metrology Techniques Spectroscopy and Laser Applications

Publication details

Journal / source
Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications
Pages
38–38
Publication date
5 March 2026
Language
EN