Lift-off resist for optical filters using high-temperature sputtering

2026

View at publisher

Authors: Abigail Rendos, Meg Nagesha, Keegan Sperry, Riley Forst, Supratik Dasgupta, Navas Illyaskutty, Andrew Roza, Daniel J. Nawrocki

DOI: 10.1117/12.3079850

Cited by: 0

References: 9

Fields of Study & Subjects

Optical Coatings and Gratings Advancements in Photolithography Techniques Advanced Materials and Semiconductor Technologies

References 9