A high-throughput, high-fidelity, laser-based method for cross sectioning in advanced microelectronics

Laser applications in microelectronic and optoelectronic manufacturing. Conference 2026

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Authors: Nicholas May, Matthew P. Maniscalco, Parisa Mahyari, Mohammad Taghi Mohammadi Anaei, Hongbin Choi, Marcus Emanuel, Wesley Roser, Todor Bliznakov, Toni Moore, Alexander Blagojevic, Adrian Phoulady, Sina Shahbazmohamadi
+1 more Pouya Tavousi
DOI: 10.1117/12.3080150
Cited by: 0
References: 5

Fields of Study & Subjects

Laser Material Processing Techniques Integrated Circuits and Semiconductor Failure Analysis Semiconductor Lasers and Optical Devices

Publication details

Journal / source
Laser applications in microelectronic and optoelectronic manufacturing. Conference
Pages
27–27
Publication date
4 March 2026
Language
EN