A photonic integrated circuit for 2D/3D structured illumination microscopy

Structured Illumination Microscopy (SIM) is a super-resolution imaging technique that uses a spatially modulated light pattern to excite sample fluorescence. Image quality depends on the pattern properties and its ability to shift across the sample. Currently, pattern generation and translation rely on complex optical setups. A fully integrated optical device fabricated by femtosecond laser micromachining is proposed for versatile pattern generation and translation exploiting integrated photonic circuits in a glass chip, enabling standard microscopes to achieve super-resolution for 2D and 3D imaging. This work allows us to realize a compact device able to realize patterned light to overcome diffraction limit of light.