Advances and new trends in in-situ and connected metrology

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Authors: K. Haberland
Cited by: 0

Fields of Study & Subjects

Advanced Measurement and Metrology Techniques Scientific Measurement and Uncertainty Evaluation Optical measurement and interference techniques

Publication details

Journal / source
Light-Emitting Devices, Materials, and Applications
Pages
28–28
Publication date
5 March 2026
Language
EN