Sputtering deposition of TiO2 combining high thickness, high amorphosity, high refractive index, and low defect level for surface relief grating manufacturing

Optical Architectures for Displays and Sensing in Augmented, Virtual, and Mixed Reality (AR, VR, MR) 2026

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Authors: Daniel de Sa Pereira, Julian Benz, S. Mingels, Philipp Spindler
DOI: 10.1117/12.3080544
Cited by: 0
References: 5

Fields of Study & Subjects

Optical Coatings and Gratings TiO2 Photocatalysis and Solar Cells Thin-Film Transistor Technologies

Publication details

Journal / source
Optical Architectures for Displays and Sensing in Augmented, Virtual, and Mixed Reality (AR, VR, MR)
Pages
34–34
Publication date
5 March 2026
Language
EN