Low-resolution reflectometry for inline thin-film inspection

2026

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Authors: Silas Ifeanyi, Alex Zheng, Kevin P. Musselman, Simar Saini

DOI: 10.1117/12.3080563

Cited by: 0

References: 17

Fields of Study & Subjects

Microwave and Dielectric Measurement Techniques Non-Destructive Testing Techniques Surface Roughness and Optical Measurements

References 17