High-power and ultrashort IR-driver platform for industrial coherent XUV metrology

Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications 2026

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Authors: Quentin Mocaer, Antoine Comby, Florent Guichard, Clemens Hönninger, Sebastien Renard, Jean Charbrerie, Adrien Feytout, Cedric Brun, Yin Tao, Stephen Edward, David P. O’Dwyer
DOI: 10.1117/12.3080580
Cited by: 0

Abstract

We report on the development of a robust 100W and 35fs IR platform to efficiently generate coherent XUV radiations down to 140eV. The secondary photon flux is used to performed ptychographic imaging of nanometric structures on semiconductor-wafers.

Fields of Study & Subjects

Advanced X-ray Imaging Techniques Laser-Matter Interactions and Applications Particle Accelerators and Free-Electron Lasers

Publication details

Journal / source
Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications
Pages
19–19
Publication date
4 March 2026
Language
EN