Optimisation of femtosecond laser via drilling in glass, silicon, and 4H-SiC

Laser applications in microelectronic and optoelectronic manufacturing. Conference 2026

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Authors: Bogusz D. Stepak, Michał Ćwikła, Rafał Smolin, Natalia Grudzień, Yuriy Stepanenko, Michał Nejbauer
DOI: 10.1117/12.3080732
Cited by: 0

Fields of Study & Subjects

Laser Material Processing Techniques Laser-Matter Interactions and Applications Photonic Crystal and Fiber Optics

Publication details

Journal / source
Laser applications in microelectronic and optoelectronic manufacturing. Conference
Pages
7–7
Publication date
4 March 2026
Language
EN