Smoothness improvement of blazed and anti-blaze silicon dioxide surfaces via ion beam etch for high-volume manufacturing

2026

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Authors: Paulo Lima, David Pearson, S. Pochon, Andrew Newton
DOI: 10.1117/12.3080740
Cited by: 0
References: 6

Fields of Study & Subjects

Ion-surface interactions and analysis Surface Roughness and Optical Measurements Advancements in Photolithography Techniques

Publication details

Pages
87–87
Publication date
15 January 2026