Ultrashort pulsed laser grooving of semiconductors and dielectrics using UV bursts and DUV
Abstract
In this contribution we investigate the application of a recently available, industrial-grade ultra-short pulsed laser operating at 266 nm to laser grooving and compare its performance to the state-of-the-art UV processing. Furthermore, we analyze the potential for improving quality and productivity by utilizing MHz bursts at 345nm and GHz as well as MHz bursts at 515 nm.
Fields of Study & Subjects
Laser Material Processing Techniques
Laser-Matter Interactions and Applications
Semiconductor Lasers and Optical Devices
Publication details
- Journal / source
- Laser-based Micro- and Nanoprocessing
- Pages
- 56–56
- Publication date
- 4 March 2026
- Language
- EN