Femtosecond laser patterning of Ti3C2Tₓ MXene for high-precision micro-supercapacitor electrodes
Abstract
Ti₃C₂Tₓ MXene, known for its high conductivity and processability, was used to fabricate micro-supercapacitors via femtosecond laser micromachining. Uniform ~1.2 µm films were drop-cast and patterned into interdigitated electrodes without masks or chemicals. Raman confirmed structural preservation post-processing. The devices showed 19 mF/cm² areal capacitance and strong cycling stability, offering a scalable route for energy storage in miniaturized electronics.
Fields of Study & Subjects
MXene and MAX Phase Materials
Supercapacitor Materials and Fabrication
Advanced Machining and Optimization Techniques
Publication details
- Journal / source
- Nanoscale and Quantum Materials: From Synthesis and Laser Processing to Applications
- Pages
- 6–6
- Publication date
- 4 March 2026
- Language
- EN