CMOS-fabricated electro-optomechanical microdisk resonator with DC-tunable mechanical dissipation

Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications 2026

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Authors: John P. Mack, Alexandria Miera, Andrew Starbuck, Andrew J. Leenheer, Douglas C. Trotter, Nils T. Otterstrom, Matthew Storey, Matt Eichenfield
DOI: 10.1117/12.3081195
Cited by: 0
References: 4

Fields of Study & Subjects

Mechanical and Optical Resonators Advanced MEMS and NEMS Technologies Photonic and Optical Devices

Publication details

Journal / source
Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications
Pages
22–22
Publication date
5 March 2026
Language
EN