High-performance common-anode multijunction VCSEL arrays for LiDAR applications

With the increasing demands of LiDAR applications for high power density, fast response, and high integration, conventional common-cathode VCSEL arrays are facing growing challenges in circuit driving and packaging design. In contrast, common-anode VCSEL arrays are inherently compatible with high-performance, compact N-MOS transistors, which offer significantly faster switching speeds and smaller footprint compared to P-MOS (pnp) counterparts. This enables the development of faster, more compact driver circuits. In this work, we report the recent research and product advancements on common-anode multi-junction VCSELs by Everbright. We comparatively investigate the structural design, epitaxial growth, and device performance of common-anode VCSELs fabricated on n-type substrates. As a result, we demonstrate 8J-VCSEL arrays with a peak output power exceeding 300 W, a beam divergence angle below 16°, and PCE greater than 33%. The output power reduction ratio is less than 13% from 25°C to 125°C. A 12-junction VCSEL array delivers 1100 W without rollover, reaching 24,000 W/mm2 single-aperture power density and >7,500 W/mm² array-level power density. Furthermore, under a 5-nanosecond pulse width and a junction temperature of 125°C, the high-temperature operating lifetime (HTOL) reliability has accumulated over 10000 hours. The study presents a scalable solution that serves as a reference for future LiDAR development.