An industrial workflow for scalable micro and nanostructures

Jointly developed by Himax IGI, 3D AG, and polyscale innovations GmbH, this white paper outlines an end-to-end fabrication workflow designed to scale micro- and nanostructures from concept to industrial production. The workflow initiates with Himax IGI, leveraging large-area lithographic origination on glass substrates. This is followed by the tooling phase at 3D AG, where electroforming is used to produce high quality nickel shims. These shims are subsequently converted into cylindrical sleeves through specialized precision laser welding and forming techniques. The final stage is executed by polyscale innovations GmbH, focusing on industrial nanoimprint replication and rigorous quality control for structural fidelity and scalability. Analysis of the replicated microstructures demonstrates exceptional precision: • Angular accuracy: Deviations between microstructures are limited to ±0.32° • Planar dimensions: Accuracy is maintained within ±0.39 μm • Vertical fidelity: Reproducible structure height accuracy of ±0.12 μm This collaboration successfully integrates three specialized technical domains - origination, tooling, and volume replication into a synchronized industrial process. The results validate that clearly defined interfaces and unified quality standards enable a reliable transition from complex laboratory designs to high-volume, industrial-grade manufacturing.