Laser micromachining of glasses and crystals with 40fs pulses in single pulse and MHz/GHz burst regime

Laser applications in microelectronic and optoelectronic manufacturing. Conference 2026

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Authors: Beat Neuenschwander, Oleg Pronin, Simon Walker, Kilian Fritsch, Christian Franke
DOI: 10.1117/12.3081955
Cited by: 0

Fields of Study & Subjects

Laser Material Processing Techniques Laser-Matter Interactions and Applications Glass properties and applications

Publication details

Journal / source
Laser applications in microelectronic and optoelectronic manufacturing. Conference
Pages
29–29
Publication date
4 March 2026
Language
EN