High-precision multilayer alignment using metasurfaces
Fields of Study & Subjects
Metamaterials and Metasurfaces Applications
Advanced Antenna and Metasurface Technologies
Nanofabrication and Lithography Techniques
Publication details
- Journal / source
- High Contrast Metastructures
- Pages
- 9–9
- Publication date
- 5 March 2026
- Language
- EN