Study of silicon photonics under-cavity etching

2026

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Authors: Jiayu Sun, Qingpeng Wang, Yanlong Guo, Caigan Chen, Kaiqi Xie, Jian Huang, Yushan Chi

DOI: 10.1117/12.3082866

Cited by: 0

References: 3

Fields of Study & Subjects

Photonic and Optical Devices Laser Material Processing Techniques Semiconductor Lasers and Optical Devices

References 3