SI-traceable optoelectronic waveforms for on-wafer network analysis

Emerging high frequency electronic and photonic circuits demand multi-port network measurements from DC to >110GHz capable of capturing nonlinear and time-domain responses with traceable radio frequency (RF) power. To solve this challenge, we have developed RF impedance standards and power sensors that we measure on-wafer using microwave probes, mitigating connector limitations. Heterogeneously integrated photodiodes provide the last piece of the measurement technique: on-wafer optoelectronic phase references from 100MHz to 220GHz. Electro-optic sampling and wave parameter correction of the photodiode signals provide waveforms with SI-traceable phase versus frequency. Together with the impedance and power standards, the optoelectronic phase references allow us to measure SI-traceable electronic waveforms to 220GHz, unlocking new nonlinear and time domain circuit measurements.