Advances in MOCVD system performance for high volume manufacturing photonic applications

Light-Emitting Devices, Materials, and Applications 2026

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Authors: Drew Hanser, Eric A. Armour, Wei Chan, Bojan M. Mitrovic, Scott Burfeind, Sandeep R Krishnan, Martin Diaz, Javier Banos
DOI: 10.1117/12.3086488
Cited by: 0

Fields of Study & Subjects

Semiconductor materials and devices Advanced Materials and Semiconductor Technologies Photonic and Optical Devices

Publication details

Journal / source
Light-Emitting Devices, Materials, and Applications
Pages
26–26
Publication date
5 March 2026
Language
EN