A semi-model-based nonlinear robust control architecture of a high-speed high-precision dual-stage stepper wafer stage

2026

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Authors: Chujun Liu, Fei Ban, Xuanyu Wei, Yi Liu, Minggang Liu

DOI: 10.1117/12.3089210

Cited by: 0

Fields of Study & Subjects

Piezoelectric Actuators and Control Control Systems in Engineering Adaptive Control of Nonlinear Systems