Full-color micro-LED display enabled by photolithographic nano-phosphor patterning

Realizing high-resolution, full-color Micro-LED displays remains challenging due to the difficulty of integrating RGB emission using scalable and manufacturable processes. In this work, we demonstrate a lithography-compatible nanophosphor color-conversion approach for full-color Micro-LED integration. A nanoparticle-based phosphor composite is patterned at the subpixel scale through standard photolithography, enabling accurate alignment with a blue Micro-LED array and a pre-defined color-filter substrate. The patterned film exhibits strong emission confinement with minimal lateral leakage, allowing pixel-resolved red and green conversion from blue excitation. Prototype devices show uniform RGB output and promising display performance, indicating the feasibility of this strategy for compact micro-display platforms. This conference paper summarizes the fabrication route and key optical characteristics, while extended material and device analyses are reported separately in an ongoing journal submission.