Pulsed ion beam figuring technology for optical components

At present, the processing accuracy requirements of optical components have reached the nanometer or even sub-nanometer level, and the dynamic performance of the machine tool significantly impacts processing accuracy for the traditional ion beam processing technology. In order to solve the problem that the dynamic performance of machine tools is difficult to meet the requirements of high-precision ion beam processing, this paper proposes a pulsed ion beam processing method for the current situation of traditional ion beam processing technology and the application of pulse technology in other scientific and technological fields. By combining a pulsed power supply with an ion beam extraction system, we physically realize the generation of a pulsed ion beam for optical component figuring. In addition, we have established a mathematical model of the pulse duty cycle and carried out a figuring simulation. The final error characterization and repair experimental results show that it is easier to achieve high-precision deterministic material removal by adjusting the pulse duty cycle to replace the acceleration change of the machine tool motion axis, and offers broader parameter adjustability and higher cost-effectiveness, which is expected to further promote the development of ultra-precision ion beam processing technology.