Development and application of actinic evaluation platform on comprehensive optical properties of EUV pellicle at Pohang Accelerator Laboratory

Metrology, Inspection, and Process Control XXXVI 2026

View at publisher

Authors: Geonhwa Kim, Jiho Kim, Namhyun Kim, Hyuk Jin Kim, Byeong-Gyu Park, Jeong Kyu Kim, Sangsul Lee

DOI: 10.1117/12.3090024

Cited by: 0

References: 4

Fields of Study & Subjects

Advancements in Photolithography Techniques Advanced X-ray Imaging Techniques Optical Coatings and Gratings

References 4