Nanoimprint lithography progress in manufacturing and integration

Novel Patterning Technologies 2026 2026

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Authors: Ryo Nawata, Noriyasu Hasegawa, Kenji Yamamoto, Kiyohito Yamamoto, Masayuki Kagawa, Mitsuru Hiura, Keita Sakai, Yukio Takabayashi

DOI: 10.1117/12.3091669

Cited by: 1

Fields of Study & Subjects

Nanofabrication and Lithography Techniques Advancements in Photolithography Techniques Block Copolymer Self-Assembly