Error correction method for enhanced focus detection accuracy in high-resolution lithography

2026

View at publisher

Authors: Taibei Li, Minggang Liu, Weijie Kong, Changtao Wang, Mingbo Pu, Xiaoliang Ma, Xiong Li, X. J. Luo

DOI: 10.1117/12.3091677

Cited by: 0

Fields of Study & Subjects

Advancements in Photolithography Techniques Image Processing Techniques and Applications Optical measurement and interference techniques