On standardization of MEMS packaging and testing

With the rapid progress of micro-electro-mechanical systems (MEMS) technology, its applications in consumer electronics, automotive industry, medical and health care and many other fields continue to expand. As a core step to ensure the stability and reliability of MEMS device performance, the need for standardization has become more and more significant. MEMS packaging products have problems such as large volume differences, strong technical diversity, and wide variety, and the standardization construction faces many difficulties. This paper is dedicated to exploring the standardization needs of MEMS packaging and testing, aiming to build a multi-level, coordinated and comprehensive coverage of all aspects of MEMS packaging and testing standards system.