Blue-X: exploring advanced optical projection lithography below 13.5 nm

Optical and EUV Nanolithography XXXIX 2026

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Authors: Vivek Bakshi
DOI: 10.1117/12.3092615
Cited by: 1

Fields of Study & Subjects

Advancements in Photolithography Techniques Nanofabrication and Lithography Techniques Advanced optical system design

Publication details

Journal / source
Optical and EUV Nanolithography XXXIX
Publisher
SPIE
Pages
27–27
Publication date
9 April 2026