Implementation of Smith predictor with variable universe fuzzy PID for lithography air shower thermal regulation

International Conference on Advanced Manufacturing Technology and Electronic Information (AMTEI) 2026

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Authors: Haiyang Zhao, Yupu Wang, Yang Sui, Bing Wang, Yong Yang
DOI: 10.1117/12.3096338
Cited by: 0

Fields of Study & Subjects

Advanced Sensor and Control Systems Fuzzy Logic and Control Systems Advanced Control Systems Design

Publication details

Journal / source
International Conference on Advanced Manufacturing Technology and Electronic Information (AMTEI)
Pages
99–99
Publication date
14 January 2026