An ultra-high vacuum ellipsometer for EUV Mueller matrix spectroscopic ellipsometry

Metrology, Inspection, and Process Control XXXVI 2026

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Authors: Purnima P. Balakrishnan, John H. Burnett, Aaron Chew, Colton Dudley, Thomas A. Germer, Steven Grantham, Stephanie L. Moffitt, Bryan M. Barnes, Eric L. Shirley, Martin Y. Sohn, Daniel F. Sunday
DOI: 10.1117/12.3108237
Cited by: 0

Fields of Study & Subjects

Optical Polarization and Ellipsometry Electron and X-Ray Spectroscopy Techniques Advanced X-ray Imaging Techniques

Publication details

Journal / source
Metrology, Inspection, and Process Control XXXVI
Pages
228–228
Publication date
26 February 2026
Language
EN