High-transmission CNT-based membrane for EUV (Erratum)

2026

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Authors: Mark A. van de Kerkhof
DOI: 10.1117/12.3109480
Cited by: 0

Abstract

This paper, originally published on 3 June 2025, was replaced with a corrected/revised version on 8 January 2026. The author added references to the manuscript. If you downloaded the original PDF but are unable to access the revision, please contact SPIE Digital Library Customer Service for assistance. Download the erratum for additional details.

Fields of Study & Subjects

Nanofabrication and Lithography Techniques Carbon Nanotubes in Composites Nanopore and Nanochannel Transport Studies

Publication details

Pages
26–26
Publication date
8 January 2026