Ferroelectricity in atomic-scale titanium dioxide dielectric films

Science 2026

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Authors: Koushik Das, Kate Reidy, Sajid Husain, Jong Ho Park, Harishankar Jayakumar, Vivek Thampy, Christoph Klewe, Ramamoorthy Ramesh, Andrew M. Minor, Archana Raja, Sayeef Salahuddin
DOI: 10.1126/science.aec9417
Cited by: 6
References: 52

Abstract

Ferroelectricity at atomic-scale thickness would have important applications in next-generation electronics. Here, we report that a ferroelectric phase can be stabilized in titanium dioxide (TiO 2 ) films, a commonly known dielectric that is widely used in semiconductor technologies, by reducing thickness to

Fields of Study & Subjects

Semiconductor materials and devices Ferroelectric and Piezoelectric Materials Electronic and Structural Properties of Oxides

Publication details

Journal / source
Science
Publisher
American Association for the Advancement of Science (AAAS)
Volume
392
Issue
6795
Pages
280–284
Publication date
5 March 2026
Language
EN