Erratum to: Study of the Influence of the Energy of Argon Ions on the Surface Roughness of the Main Sections of Single-Crystal Silicon

Technical Physics 2026 Open access

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Authors: Mikhail S. Mikhailenko, А. Е. Пестов, A. K. Chernyshev, Zorina M.V., Chkhalo N.I., N. N. Salaschenko
DOI: 10.1134/s1063784226010019
Cited by: 0

Abstract

An Erratum to this paper has been published: https://doi.org/10.1134/S1063784226010019

Fields of Study & Subjects

Ion-surface interactions and analysis Advanced Surface Polishing Techniques Laser Material Processing Techniques

Publication details

Journal / source
Technical Physics
Volume
71
Issue
1
Pages
45–45
Publication date
1 January 2026
Language
EN