Erratum to: Investigation of the Angular Dependences of the Velocities of Ion-Beam Sputtering of Metals for the Synthesis of Mask Blanks

Technical Physics 2026 Open access

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Authors: Mikhail S. Mikhailenko, А. Е. Пестов, A. K. Chernyshev, Chkhalo N.I.
DOI: 10.1134/s1063784226010020
Cited by: 0

Abstract

An Erratum to this paper has been published: https://doi.org/10.1134/S1063784226010020

Fields of Study & Subjects

Ion-surface interactions and analysis Advancements in Photolithography Techniques Plasma Diagnostics and Applications

Publication details

Journal / source
Technical Physics
Volume
71
Issue
1
Pages
46–46
Publication date
1 January 2026
Language
EN