High-energy beam surface modification of SiC: current status and future perspectives

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Authors: Chengkai Fan, Yifei Wang, Ruoming Li, Chao Guo, Lei Liu, Ruixue Shi, Mingyu Shi, Wenbo Yan
Cited by: 1
References: 40

Fields of Study & Subjects

Pulsed Power Technology Applications Silicon Carbide Semiconductor Technologies Metal and Thin Film Mechanics

Publication details

Journal / source
The European Physical Journal Special Topics
Publisher
Springer Science and Business Media LLC
Volume
235
Issue
24
Pages
5249–5264
Publication date
4 August 2026
Language
EN