High-energy beam surface modification of SiC: current status and future perspectives
Fields of Study & Subjects
Pulsed Power Technology Applications
Silicon Carbide Semiconductor Technologies
Metal and Thin Film Mechanics
Publication details
- Journal / source
- The European Physical Journal Special Topics
- Publisher
- Springer Science and Business Media LLC
- Volume
- 235
- Issue
- 24
- Pages
- 5249–5264
- Publication date
- 4 August 2026
- Language
- EN