Files for "Fabrication and characterization of an adaptive thin-film electrostatic phase plate"

DTU Data 2026 Dataset Open access

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Authors: Mathias Vadmand Adelmark, Payam Habibzadeh Kavkani, Ebrahim Chalangar, Rafael Taboryski, Andrei V. Lavrinenko, Marco Beleggia, Ada‐Ioana Bunea
DOI: 10.11583/dtu.30256696
Cited by: 1

Abstract

Design files for paper "Fabrication and characterization of an adaptive thin-film electrostatic phase plate", DOI: https://doi.org/10.1103/l2fs-ctzq:Files include a gds and a map file containing all information on the design used for lithography during cleanroom fabrication. The files are designed and generated with the use of Clewin

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Journal / source
DTU Data
Publication date
9 April 2026
Document type
Dataset